Semiconductor pressure sensor having diaphragm

Details Semiconductor pressure sensor having diaphragm Semiconductor pressure sensor having diaphragm

Filed on

2005-12-13

Date issued

2005-12-13

Examiner

Lefkowitz, Edward (Department: 2855)

Patent Class

Measuring and testing

SubClass

Fluid pressure gauge

SubSubClass

Electrical

Other Related Categories

C073S715000, C073S719000

Type

Reexamination Certificate

Status

active

Patent number

06973836

Description

ABSTRACT:
A semiconductor pressure sensor includes a semiconductor substrate having a diaphragm for receiving pressure and a bridge circuit for detecting a distortion of the diaphragm corresponding to the pressure. The bridge circuit includes a pair of first gauge resistors and a pair of second gauge resistors. The first gauge resistors are disposed on a center of the diaphragm, and the second gauge resistors are disposed on a periphery of the diaphragm. Each first gauge resistor has a first resistance, which is larger than a second resistance of each second gauge resistor. The TNO property of the sensor is improved, so that the sensor has high detection accuracy.

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patent: 6595065 (2003-07-01), Tanizawa et al.
patent: 6601452 (2003-08-01), Murata et al.

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