External resonance circuit type radio frequency quadrupole accel

Details External resonance circuit type radio frequency quadrupole accel External resonance circuit type radio frequency quadrupole accel

1989-11-20

1992-02-04

LaRoche, Eugene R.

Electric lamp and discharge devices: systems

Discharge device load with fluent material supply to the...

Electron or ion source

31511121, 250423R, 20419211, 20419237, 20429802, 20429804, H01J 2510

Patent

active

050862561

ABSTRACT:
An Mev ion implantation apparatus which does not contaminate a sample substrate with heavy metal particles. The apparatus includes an external resonance circuit type RFQ accelerator incluidng undulated quadrupole electrodes and a separate radio frequency resonance circuit for generating a radio frequency high voltage to be supplied to the electrodes. The undulated quadrupole electrodes and at least a part of metallic supports for supporting the electrodes and voltage supplying lines are provided with a surface coating of silicon, silicon doped with an impurity such as boron, phosphorus, or arsenic, or a light element having a mass number of 28 or less, such as carbon.

REFERENCES:
patent: 3665245 (1972-05-01), Schwarz
patent: 3793063 (1974-02-01), Wiley
patent: 4108751 (1978-08-01), King
patent: 4135094 (1979-01-01), Hull
patent: 4234791 (1980-11-01), Enke et al.
patent: 4266127 (1981-05-01), Change
patent: 4330384 (1982-05-01), Okudaira et al.
patent: 4494040 (1985-01-01), Moretti
patent: 4755670 (1988-07-01), Syka et al.
patent: 4792687 (1988-12-01), Mobley
patent: 4801847 (1989-01-01), Sakudo et al.
patent: 4843034 (1989-06-01), Herndon et al.
patent: 4867939 (1989-09-01), Deutch
patent: 4937206 (1990-06-01), Jaffe et al.

Affiliated with

Also associated with

Rating

External resonance circuit type radio frequency quadrupole accel does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with External resonance circuit type radio frequency quadrupole accel, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and External resonance circuit type radio frequency quadrupole accel will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-349332