Drying and gas or vapor contact with solids – Apparatus – With fluid current conveying of treated material
Reexamination Certificate
2005-11-08
2005-11-08
Bennett, Henry (Department: 3749)
Drying and gas or vapor contact with solids
Apparatus
With fluid current conveying of treated material
C034S426000, C034S448000, C034S210000, C034S232000, C134S036000, C134S095200
Reexamination Certificate
active
06962007
ABSTRACT:
A device for drying substrates which stores a plurality of substrate (1) and which comprises a processing container (3) to which cleaning fluid (2) after cleaning the substrates (1) is drained and an injection nozzle (5) for injecting drying fluid located at the terminating part of a feed pipe (4) through which liquid drying fluid is supplied, whereby an exhaust equipment is eliminated or simplified, and the drying fluid is fed smoothly.
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The Authoritative Dictionary of IEEE Standard Terms; IEEE Press; 7th Edition; 2000; p. 762.
Aihara Hiroshi
Maeda Norio
Oono Masao
Sumi Koji
Tani Naoaki Izu
Bennett Henry
Daikin Industries Ltd.
O'Malley Kathryn S.
Shinjyu Global IP Counselors, LLP.
Toho Kasei Ltd.
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