Exposure method and exposure apparatus

Details Exposure method and exposure apparatus Exposure method and exposure apparatus

2005-06-07

2005-06-07

Nguyen, Henry Hung (Department: 2851)

Photocopying

Projection printing and copying cameras

With temperature or foreign particle control

C355S053000

Reexamination Certificate

active

06903799

ABSTRACT:
The present invention provides an exposure method and exposure apparatus that enable the effects on an apparatus main body of heat generated by a control system to be suppressed when an error occurs in an air-conditioning system or temperature control system. In the exposure apparatus of the present invention, if an error occurs in an air-conditioning system (50) that air-conditions an interior of a chamber (11to16) in which an exposure body section (STP) is housed or occurs in a temperature control system (52) that controls a temperature of the exposure body section (STP), a power supply of a control system (53to56) that controls the exposure body section (STP) is shut down.

REFERENCES:
patent: 4786947 (1988-11-01), Kosugi et al.
patent: 5828572 (1998-10-01), Hasegawa et al.
patent: 6304005 (2001-10-01), Aoki et al.
patent: A 2-148822 (1990-06-01), None
patent: 06-019520 (1994-01-01), None
patent: A 11-204390 (1999-07-01), None
patent: A 2000-100717 (2000-04-01), None
patent: A 2000-252194 (2000-09-01), None
patent: A 2000-331921 (2000-11-01), None
patent: A 2001-218424 (2001-08-01), None

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