Gating grid and method of making same

Details Gating grid and method of making same Gating grid and method of making same

2005-12-20

2005-12-20

Pert, Evan (Department: 2826)

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

C029S846000

Reexamination Certificate

active

06977381

ABSTRACT:
A gating grid for deflecting ions includes an insulating substrate (16), a conducting layer (28) adhered to the insulating substrate (16), and interdigitated electrodes (14) patterned in the conducting layer by a photolithographic process. A hole (18) in the insulating substrate beneath the interdigitated electrodes allows ions to pass through the hole in the substrate. A process for making a gating grid for deflecting ions includes adhering a conducting layer (28) to an insulating substrate (16), forming interdigitated electrodes (14) on the conducting layer (28), and then forming a hole (18) in the insulating substrate beneath the interdigitated electrodes.

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