Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Reexamination Certificate
2005-12-27
2005-12-27
Letscher, Geraldine (Department: 1752)
Radiation imagery chemistry: process, composition, or product th
Radiation modifying product or process of making
Radiation mask
C430S321000, C430S322000
Reexamination Certificate
active
06979521
ABSTRACT:
The present invention relates to manufacturing grayscale masks that are used for mass-producing grayscale DOEs. More specifically, the present invention provides a method whereby a grayscale mask is fabricated by using an absorber layer and a photoresist with a laser writer. The method of the present invention includes the steps of providing a substrate with a known layer of absorber and a layer of photoresist, exposing the photoresist to a grayscale pattern from a laser writer, developing the photoresist into variable thickness, and transferring the surface relief pattern from the photoresist layer onto the absorber layer by etching.
REFERENCES:
patent: 5078771 (1992-01-01), Wu
patent: 5310623 (1994-05-01), Gal
patent: 6071652 (2000-06-01), Feldman et al.
patent: 6420073 (2002-07-01), Suleski et al.
patent: 6562523 (2003-05-01), Wu et al.
patent: 6613498 (2003-09-01), Brown et al.
patent: 6638667 (2003-10-01), Suleski et al.
patent: 2004/0009413 (2004-01-01), Lizotte
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