Turbo-molecular pump having radiation temperature apparatus

Details Turbo-molecular pump having radiation temperature apparatus Turbo-molecular pump having radiation temperature apparatus

2005-02-08

2005-02-08

Fulton, Christopher W. (Department: 2859)

Thermal measuring and testing

Temperature measurement

In spaced noncontact relationship to specimen

C374S002000, C374S141000

Reexamination Certificate

active

06851848

ABSTRACT:
A turbo-molecular pump has components including a stator column, a rotary shaft, and a blade connected to the rotary shaft for rotation therewith. A radiation temperature measuring apparatus has a radiation thermometer for measuring a temperature of a preselected one of the components of the turbo-molecular pump disposed within a view angle range of the radiation thermometer and in accordance with heat energy radiated from the preselected component. A hood is connected to the radiation thermometer so as to not interfere with the view angle range of the radiation thermometer and is configured to block heat energy radiated from components of the turbo-molecular pump disposed outside of the view angle range of the radiation thermometer.

REFERENCES:
patent: 3598136 (1971-08-01), Zaginailoff
patent: 4032944 (1977-06-01), van Dongen et al.
patent: 4854730 (1989-08-01), Fraden
patent: 6214034 (2001-04-01), Azar
patent: 6443616 (2002-09-01), Brotz
patent: 6596995 (2003-07-01), Bender
patent: 6667372 (2003-12-01), Kajikawa et al.
patent: 6729756 (2004-05-01), Sezai
patent: 58218673 (1983-12-01), None

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