Optical: systems and elements – Having significant infrared or ultraviolet property – Lens – lens system or component
Reexamination Certificate
2005-10-18
2005-10-18
Nguyen, Thong Q. (Department: 2872)
Optical: systems and elements
Having significant infrared or ultraviolet property
Lens, lens system or component
C359S355000, C359S350000, C355S053000
Reexamination Certificate
active
06956694
ABSTRACT:
An ultraviolet (UV) catadioptric imaging system, with broad spectrum correction of primary and residual, longitudinal and lateral, chromatic aberrations for wavelengths extending into the deep UV (as short as about 0.16 μm), comprises a focusing lens group with multiple lens elements that provide high levels of correction of both image aberrations and chromatic variation of aberrations over a selected wavelength band, a field lens group formed from lens elements with at least two different refractive materials, such as silica and a fluoride glass, and a catadioptric group including a concave reflective surface providing most of the focusing power of the system and a thick lens providing primary color correction in combination with the focusing lens group. The field lens group is located near the intermediate image provided by the focusing lens group and functions to correct the residual chromatic aberrations. The system is characterized by a high numerical aperture (typ. greater than 0.7) and a large flat field (with a size on the order of 0.5 mm). The broad band color correction allows a wide range of possible UV imaging applications at multiple wavelengths.
REFERENCES:
patent: 3748015 (1973-07-01), Offner
patent: 4247203 (1981-01-01), Levy et al.
patent: 4331390 (1982-05-01), Shafer
patent: 4342503 (1982-08-01), Shafer
patent: 4391494 (1983-07-01), Hershel
patent: 4556317 (1985-12-01), Sandland et al.
patent: 4618938 (1986-10-01), Sandland et al.
patent: 4747678 (1988-05-01), Shafer et al.
patent: 4749840 (1988-06-01), Piwczyk
patent: 4779966 (1988-10-01), Friedman
patent: 4792695 (1988-12-01), Blandford
patent: 4845558 (1989-07-01), Tsai et al.
patent: 4891663 (1990-01-01), Hirose
patent: 5031976 (1991-07-01), Shafer
patent: 5031977 (1991-07-01), Gibson
patent: 5034611 (1991-07-01), Alpern et al.
patent: 5052763 (1991-10-01), Singh et al.
patent: 5112129 (1992-05-01), Davidson et al.
patent: 5161062 (1992-11-01), Shafer et al.
patent: 5412219 (1995-05-01), Chappelle et al.
patent: 5488229 (1996-01-01), Elliott et al.
patent: 5515207 (1996-05-01), Foo
patent: 6064517 (2000-05-01), Chuang et al.
patent: 0 204 071 (1986-12-01), None
patent: 0 405 051 (1991-01-01), None
patent: 0 628 806 (1994-12-01), None
patent: 0 736 789 (1996-10-01), None
patent: 2 158 675 (1985-11-01), None
patent: 85/00408 (1985-01-01), None
patent: 86/01096 (1986-02-01), None
patent: 86/02730 (1986-05-01), None
patent: 86/07148 (1986-12-01), None
Offner, “Field Lenses and Secondary Axial Aberration,” Applied Optics, Aug. 1969, vol. 8, No. 8, pp. 1735-1736.
Chuang Yung-Ho
Shafer David R.
Tsai Bin-Ming B.
Daffer McDaniel LLP
KLA-Tencor Technologies Corp.
Mewherter Ann Marie
Nguyen Thong Q.
LandOfFree
Broad spectrum ultraviolet inspection systems employing... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Broad spectrum ultraviolet inspection systems employing..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Broad spectrum ultraviolet inspection systems employing... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3483726