Flexible recipe modeling and recipe cluster management system

Details Flexible recipe modeling and recipe cluster management system Flexible recipe modeling and recipe cluster management system

2005-11-22

2005-11-22

Picard, Leo (Department: 2125)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C700S097000, C700S099000, C700S100000, C700S115000, C700S121000, C700S083000, C715S810000, C715S845000, C715S964000

Reexamination Certificate

active

06968245

ABSTRACT:
A flexible recipe modeling system and method is provided for improving the processing reliability of a fabrication process by customizing recipes processed by fabrication equipment including associated different chambers of a multi-chamber processing machine by allowing a responsible engineer to add or modify individual recipe clusters including grouping of recipes into clusters to represent the same process capacity for a piece of fabrication equipment and providing a material execute system having a recipe cluster management engine (RCME) for management of the RCMS.

REFERENCES:
patent: 4835730 (1989-05-01), Shimano et al.
patent: 5444632 (1995-08-01), Kline et al.
patent: 5740053 (1998-04-01), Iwama
patent: 5838565 (1998-11-01), Hsieh et al.

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