MEMS optical switch with thermal actuator

Details MEMS optical switch with thermal actuator MEMS optical switch with thermal actuator

2005-02-08

2005-02-08

Lee, John D. (Department: 2874)

Optical waveguides

With optical coupler

Switch

C359S107000, C359S108000

Reexamination Certificate

active

06853765

ABSTRACT:
A MEMS type optical switch includes a substrate, the substrate including at least one groove formed therein; first and second optical fibers disposed in the at least one groove, the at least one groove including a widened portion for movement of at least one of the first and second optical fibers; a thermal actuator disposed adjacent one of the first and second optical fibers, the thermal actuator comprising at least one v-beam, a pair of anchors connected to ends of the v-beam, and a yoke disposed in a central portion of the v-beam.

REFERENCES:
patent: 4946236 (1990-08-01), Dautartas et al.
patent: 5175776 (1992-12-01), Lee
patent: 5446811 (1995-08-01), Field et al.
patent: 6360036 (2002-03-01), Couillard
patent: 6388359 (2002-05-01), Duelli et al.
patent: 20020102061 (2002-08-01), Lang

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