Stage device, method of controlling same, and exposure...

Photocopying – Projection printing and copying cameras – Detailed holder for photosensitive paper

Reexamination Certificate

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

C355S053000, C355S075000

Reexamination Certificate

active

06859265

ABSTRACT:
A fine (short-stroke) stage is mounted on an XY slider and is capable of being moved over a minute range in the XY directions. Though the XY slider is moved along the X direction by a Y guide bar, movement along the X direction is decided by an X guide bar. If the relative angle between the direction of the X guide bar and the surface of a bar mirror of the fine stage is represented by α, then the X guide bar will be moved by αx when the XY slider has been moved by x along the X direction by the Y guide bar. After the fine stage is thus positioned, the relative positional relationship between the fine stage and the XY slider is held constant.

REFERENCES:
patent: 6151100 (2000-11-01), Yamane et al.
patent: 6559927 (2003-05-01), Tokita et al.
patent: 6570645 (2003-05-01), Korenaga et al.
patent: 20020145721 (2002-10-01), Korenaga et al.
patent: 20030098966 (2003-05-01), Korenaga et al.
patent: 20030139044 (2003-07-01), Takeishi
patent: 20030164934 (2003-09-01), Nishi et al.
patent: 20030179359 (2003-09-01), Korenaga
patent: P2000-106344 (2000-04-01), None
patent: 2002-7981 (2002-01-01), None

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Stage device, method of controlling same, and exposure... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Stage device, method of controlling same, and exposure..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Stage device, method of controlling same, and exposure... will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-3474143

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.