Semiconductor substrate, method of manufacturing the...

Details Semiconductor substrate, method of manufacturing the... Semiconductor substrate, method of manufacturing the...

2005-06-14

2005-06-14

Nguyen, Tuan H. (Department: 2813)

Semiconductor device manufacturing: process

Making device or circuit emissive of nonelectrical signal

C438S029000, C438S046000

Reexamination Certificate

active

06905898

ABSTRACT:
A semiconductor substrate comprises a semiconductor layer comprising a group III nitride as a main component. A scattering portion for scattering an incident beam of light incident on one plane of the semiconductor layer is provided on another plane or inside of the semiconductor layer.

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Richard C. Jaeger, “Introduction to Microelectronic Fabrication”, vol. 5, Addison Wesley Longman, Chapter 2, Lithography, pp. 13-26 (1993).

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