Removable reticle window and support frame using magnetic force

Details Removable reticle window and support frame using magnetic force Removable reticle window and support frame using magnetic force

2005-06-28

2005-06-28

Fuller, Rodney (Department: 2851)

Photocopying

Projection printing and copying cameras

Detailed holder for original

C355S072000, C430S005000

Reexamination Certificate

active

06912043

ABSTRACT:
An apparatus for maintaining an optical gap between a pellicle and a reticle in a photolithography system includes a frame defining first and second opposing surfaces, a reticle mated to the first opposing surface using magnetic coupling; and a pellicle mated to the second opposing surface using magnetic coupling.

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