Optical waveguide type optical modulator and production...

Details Optical waveguide type optical modulator and production... Optical waveguide type optical modulator and production...

2005-10-18

2005-10-18

Font, Frank G. (Department: 2883)

Optical waveguides

Temporal optical modulation within an optical waveguide

Electro-optic

C385S003000, C385S008000, C385S014000

Reexamination Certificate

active

06956980

ABSTRACT:
There is provided a high performance optical waveguide type optical modulator with excellent long term reliability, in which contamination of the buffer layer in a forming process of a signal field adjustment region on the buffer layer by a lift-off method or an etching method, is prevented and DC drift thus suppressed. The optical waveguide type optical modulator10comprises a substrate11having an electro-optic effect, optical waveguides12formed on the surface of this substrate11,a traveling-wave type signal electrode13aand ground electrodes13bwhich are provided on the substrate11and control a lightwave, and a buffer layer14provided between the electrodes13and the optical waveguides12,and furthermore, a dielectric layer15is provided on the entire surface of the buffer layer14on the side of the electrodes13,and a signal field adjustment region16which has a wider width than that of the traveling-wave type signal electrode13aand is made of a material with a higher refractive index than that of the dielectric layer15is formed between the dielectric layer15and the traveling-wave type signal electrode13a.

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