Monolithic two-axis MEMS device for optical switches

Details Monolithic two-axis MEMS device for optical switches Monolithic two-axis MEMS device for optical switches

2005-02-22

2005-02-22

Mack, Ricky (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S290000, C359S295000

Reexamination Certificate

active

06859300

ABSTRACT:
A two-axis MEMS device for an optical switch may be fabricated using a single wafer. The device has a movable mirror rotatably coupled to a plate, which is itself rotatably coupled to a stationary substrate to enable mirror rotation about two axes. The mirror rotates with respect to the plate in response to a first voltage applied between the mirror and a movable electrode rigidly connected to the plate. The plate rotates with respect to the substrate in response to a second voltage applied between the plate and a stationary electrode rigidly connected to the substrate. Additional movable and/or stationary electrodes may be implemented to enable bidirectional rotation of the plate and/or the mirror. A spring supporting the plate on the substrate may have two or more split parts to provide two or more independent voltages from the substrate. The electrodes may be arranged with respect to each other and/or the mirror to form a fringe-field (FF) actuator, which may alleviate any snap-down problem. Multiple devices of the invention may be arrayed in a single integrated structure to form a linear, radial, or two-dimensional array of mirrors.

REFERENCES:
patent: 5501893 (1996-03-01), Laermer et al.
patent: 5629790 (1997-05-01), Neukermans et al.
patent: 6093330 (2000-07-01), Chong et al.
patent: 6122090 (2000-09-01), Kino et al.
patent: 6201631 (2001-03-01), Greywall
patent: 6321010 (2001-11-01), Walker et al.
patent: 6337760 (2002-01-01), Huibers et al.
patent: 6351329 (2002-02-01), Greywall
patent: 6356689 (2002-03-01), Greywall
patent: 6369374 (2002-04-01), Greywall
patent: 6388789 (2002-05-01), Bernstein
patent: 6445362 (2002-09-01), Tegreene
patent: 6535663 (2003-03-01), Chertkow
patent: 6541831 (2003-04-01), Lee et al.
patent: 6590267 (2003-07-01), Goodwin-Johansson et al.
patent: 6590313 (2003-07-01), Agrawal et al.
patent: 6600591 (2003-07-01), Anderson et al.
patent: 6667823 (2003-12-01), Greywall
patent: 6695457 (2004-02-01), van Drienhuizen et al.
patent: 20020011759 (2002-01-01), Adams et al.
patent: 20020018334 (2002-02-01), Hill et al.
patent: 20020135864 (2002-09-01), Chiu et al.
patent: 20020163051 (2002-11-01), Gopal et al.
patent: 20030117152 (2003-06-01), Murphy
patent: 20030169928 (2003-09-01), Stanek
patent: 20040061414 (2004-04-01), Greywall
patent: 20040061619 (2004-04-01), Kim et al.
patent: 09159938 (1997-06-01), None

Affiliated with

Also associated with

Rating

Monolithic two-axis MEMS device for optical switches does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Monolithic two-axis MEMS device for optical switches, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Monolithic two-axis MEMS device for optical switches will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3458873