Micro-mirror device including dielectrophoretic liquid

Optical: systems and elements – Deflection using a moving element – By moving a reflective element

Reexamination Certificate

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

C359S224200

Reexamination Certificate

active

06954297

ABSTRACT:
A micro-mirror device includes a substrate having a surface, and a plate spaced from and oriented substantially parallel to the surface of the substrate such that the plate and the surface of the substrate define a cavity therebetween. A dielectrophoretic liquid capable of movement when an electrical signal is applied to the micro-mirror device is disposed in the cavity, and a reflective element is interposed between the surface of the substrate and the plate such that the reflective element is adapted to move between a first position and at least one second position.

REFERENCES:
patent: 4093534 (1978-06-01), Carter et al.
patent: 4418346 (1983-11-01), Batchelder
patent: 4662746 (1987-05-01), Hornbeck
patent: 4956619 (1990-09-01), Hornbeck
patent: 5061049 (1991-10-01), Hornbeck
patent: 5083857 (1992-01-01), Hornbeck
patent: 5583688 (1996-12-01), Hornbeck
patent: 5745281 (1998-04-01), Yi et al.
patent: 5959338 (1999-09-01), Youngner et al.
patent: 6025951 (2000-02-01), Sw art et al.
patent: 6195478 (2001-02-01), Fouquet
patent: 6323834 (2001-11-01), Colgan et al.
patent: 6359757 (2002-03-01), Mallary
patent: 6389189 (2002-05-01), Edwards et al.
patent: 6392785 (2002-05-01), Albert et al.
patent: 6404534 (2002-06-01), Chin et al.
patent: 6404942 (2002-06-01), Edwards et al.
patent: 2001/0024556 (2001-09-01), Beguin et al.
patent: 2003/0012483 (2003-01-01), Ticknor et al.
patent: 2001147385 (2001-05-01), None
patent: WO 0025160 (2000-05-01), None
patent: WO 0165292 (2001-09-01), None
patent: WO 02/088527 (2002-12-01), None
Michael Pycraft Huges, “AC Electrokinetics: Applications for Nanotechnology”, Seventh Foresight Conference on Molecular Nanotechnology, Nov. 30, 1999, pp. 1-16, retrieved from the Internet: [http://www.Foresight.org/Conferences/ MNT7/Papers/Hughes/].
A. Feinerman et al., “Fast Micro-Mirrors With Large Angle Deflections”, 25 pgs., retrieved from the Internet: [http://www.darpa.mil/mto/stab/kickoff/stab_vic.pdf].
Alexander Wolter. “Studies on a High-Resolution Spatial Light Modulator with D formable Surface Profile of a Liquid Film for Optical Pattern Generation”, Jan. 24, 2001, pp. 1-2, Abstract only.
Alexander Wolter et al., “Fabrication of the Moving Liquid Mirror (MLM) Spatial Light Modulator in a Standard CMOS-Process”, SPIE vol. 4178 (2000), pp. 246-254.
Alexander Wolter et al., “The Moving Liquid Mirror (MLM) Spatial Light Modulator: Simulation and Measurement of the Optical Performance”, MEMS-vol. 2, Micro-Electro-Mechanical Systems (MEMS) (2000), pp. 437-442.
H. Togo et al., “Multi-Element Thermo-Capillary Optical Switch and Sub-Nanoliter Oil Injection for its Fabrication”, 1999 IEEE, pp. 418-423.
Junghoon Lee et al., “Surface Tension Driven Microactuation Based on Continuous Electrowetting (CEW)”, pp. 1-25, retrieved from the Internet: [http://cjmems.seas.ucla.edu/papers/Junghoon_jmem_2000_text.pdf] and Figures 1-14, retrieved from the Internet: [http://cjmems.seas.ucla.edu/papers /Junghoon_jmem_2000_figure.pdf].
Chang-Jin “CJ” Kim, “Mems Devices Based on the Use of Surface Tension”, 4 pgs., retrieved from the Internet: [http://cjmems.seas.ucla.edu/papers/CJ_ISDRS_99.pdf].
Chang-Jin Kim, “Microfluids Using the Surface Tension Force in Microscale”, Aug. 2000, Proc. SPIE vol. 4177, Abstract only.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Micro-mirror device including dielectrophoretic liquid does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Micro-mirror device including dielectrophoretic liquid, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Micro-mirror device including dielectrophoretic liquid will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-3457738

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.