Abrading – Abrading process – With tool treating or forming
Reexamination Certificate
2005-08-16
2005-08-16
Nguyen, George (Department: 3723)
Abrading
Abrading process
With tool treating or forming
C451S021000, C451S445000, C451S444000, C451S072000, C451S443000
Reexamination Certificate
active
06929536
ABSTRACT:
A system and method for chemical mechanical polishing of a substrate is disclosed in which a polishing pad is conditioned by directing a fluid jet to the surface of the polishing pad. Thus, the use of expensive consumables, like conditioning pads comprising diamonds, can be avoided. Furthermore, the risk of substrates being scratched by diamonds lost from the conditioning pad is avoided.
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Kuhn Matthias
Lingel Stefan
Advanced Micro Devices , Inc.
Nguyen George
Williams Morgan & Amerson
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