Apparatus and method for forming a combined substrate structure

Details Apparatus and method for forming a combined substrate structure Apparatus and method for forming a combined substrate structure

2005-02-01

2005-02-01

Bennett, G. Bradley (Department: 2859)

Geometrical instruments

Gauge

Work support adjustment

C033S333000, C033S549000, C382S218000, C382S125000, C382S172000, C445S024000, C445S066000, C438S758000

Reexamination Certificate

active

06848191

ABSTRACT:
An apparatus for supporting a combined substrate structure, comprising first and second substrates combined, includes: level-adjustable supporting mechanisms for supporting plural supporting points of a bottom surface of the combined substrate structure; a level-detecting system for detecting respective levels of corresponding points of a top surface of the combined substrate structure to the plural supporting points of the bottom surface; and a control system for receiving the detected levels from the level-detecting system and for controlling the plurality of level-adjustable supporting mechanism in respective level-adjustment operations in accordance with the detected levels.

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