Thin film bulk acoustic resonator for controlling resonance...

Details Thin film bulk acoustic resonator for controlling resonance... Thin film bulk acoustic resonator for controlling resonance...

2005-11-15

2005-11-15

Mis, David (Department: 2817)

Oscillators

Solid state active element oscillator

Significant distributed parameter resonator

C331S17700V, C310S328000, C310S333000, C333S186000, C333S187000

Reexamination Certificate

active

06965274

ABSTRACT:
A thin film bulk acoustic resonator device is provided for minimizing phase noise by controlling resonance frequency. The thin film bulk acoustic resonator device comprises: a fixed body having a first electrode; a driving body having a second electrode installed to be adjacent to the fixed body and moved toward the fixed body due to voltage applied to the first and second electrodes; and a thin film bulk acoustic resonator for controlling the resonance frequency according to change of stress generated due to the movement of the driving body.

REFERENCES:
patent: 5446306 (1995-08-01), Stokes et al.
patent: 6484229 (2002-11-01), Ichikawa et al.
patent: 6566979 (2003-05-01), Larson, III et al.
patent: 6747529 (2004-06-01), Abe et al.
patent: 6809604 (2004-10-01), Kawakubo et al.
Abstract for KR 2003083887 A, Lee et al, Nov. 1, 2003.

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