Diffractive optical element for use within a projection lens sys

Optical: systems and elements – Diffraction – From grating

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359565, 359721, 359742, G02B 2744, G02B 1318

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active

056233655

ABSTRACT:
A projection lens system with a high resolving power and a wide exposure area which is effectively corrected for various aberrations including chromatic aberration and which is compact and has minimal production problems in a case where there is a limitation on vitreous materials usable as a lens material. The projection lens system (10) includes a plurality of lenses, at least one of which is a diffractive optical element (DOE) (11). The DOE (11) has a pitch arrangement in which it has a positive power in a paraxial region thereof, and wherein the positive power continuously changes to a less positive power, and then to a negative power as the distance from the optical axis of the DOE (11) increases toward the periphery thereof. Since the DOE (11) produces large aberrations which are opposite in sign to aberrations produced in the refracting system, it is possible to effectively correct various aberrations in the projection lens system (10) and also axial chromatic aberration. The above-described pitch arrangement allows an enlargement of the otherwise conventional tendency to reduce the minimum pitch of the DOE (11).

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Miyamoto, "The Phase Fresnel Lens", Journal of the Optical Society of America, vol. 51, No. 1, Jan. 1961, pp. 17-20.
William C. Sweatt, "New Methods of Designing Holographic Optical Elements", SPIE, vol. 126, Clever Optics (1977), pp. 46-53.

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