Method and apparatus for securing microelectronic workpiece...

Details Method and apparatus for securing microelectronic workpiece... Method and apparatus for securing microelectronic workpiece...

2005-11-29

2005-11-29

Le, Que T. (Department: 2878)

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

C250S559330

Reexamination Certificate

active

06969841

ABSTRACT:
An apparatus and method for handling microelectronic workpiece containers. In one embodiment, the apparatus includes a container support having one or more support elements positioned to carry a microelectronic workpiece container. A container securement device is positioned at least proximate to the support element(s). A contact surface of the securement device is moved in a first direction so that it contacts or is positioned to contact a surface of the workpiece container. The contact surface is then moved in a second direction different that the first direction to clamp the workpiece container against the support element(s).

REFERENCES:
patent: 6878955 (2005-04-01), Harris et al.

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