Stage apparatus and exposure apparatus

Details Stage apparatus and exposure apparatus Stage apparatus and exposure apparatus

2005-05-10

2005-05-10

Kim, Peter B (Department: 2851)

Photocopying

Projection printing and copying cameras

Detailed holder for photosensitive paper

C355S053000, C355S077000, C355S075000

Reexamination Certificate

active

06891599

ABSTRACT:
A stage apparatus comprising includes a stage that is movable in a direction, a multiphase actuator for generating a driving force when the stage is accelerated and decelerated in the direction, and a single-phase actuator for generating a driving force in the direction when the stage moves at a constant speed.

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patent: 9-149672 (1997-06-01), None
patent: 9-167792 (1997-06-01), None

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