CMOS imager and method of formation

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Responsive to electromagnetic radiation

Reexamination Certificate

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C438S232000, C438S237000, C438S328000

Reexamination Certificate

active

06927089

ABSTRACT:
A CMOS imager having multiple graded doped regions formed below respective pixel sensor cells is disclosed. A deep retrograde p-well is formed under a red pixel sensor cell of a semiconductor substrate to increase the red response. A shallow p-well is formed under the blue pixel sensor cell to decrease the red and green responses, while a shallow retrograde p-well is formed below the green pixel sensor cell to increase the green response and decrease the red response.

REFERENCES:
patent: 3860956 (1975-01-01), Kubo et al
patent: 5945722 (1999-08-01), Tsuei et al.
patent: 5965875 (1999-10-01), Merrill
patent: 6066510 (2000-05-01), Merrill
patent: 6094281 (2000-07-01), Nakai et al.
patent: 6150683 (2000-11-01), Merrill et al.
patent: 6330113 (2001-12-01), Slagle et al.
patent: 2002/0058353 (2002-05-01), Merrill

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