Corrosive-resistant coating over aluminum substrates for use...

Details Corrosive-resistant coating over aluminum substrates for use... Corrosive-resistant coating over aluminum substrates for use...

2005-03-08

2005-03-08

McNeil, Jennifer (Department: 1775)

Coating processes

Coating by vapor, gas, or smoke

Metal coating

C427S453000, C427S585000, C427S249500, C427S249150, C427S576000

Reexamination Certificate

active

06863926

ABSTRACT:
A method and apparatus are provided for protecting internal aluminum components of a plasma reactor from plasma-induced erosion. The components are coated, first with a dielectric layer, then with a thin layer of one or more metals selected from the group consisting of gold, chromium, platinum, silver and rhenium. The dielectric layer may either be grown or deposited. The metal layer is deposited, preferably using evaporative deposition.

REFERENCES:
patent: 4475794 (1984-10-01), Baker et al.
patent: 6620520 (2003-09-01), O'Donnell et al.

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