Wafer level burn-in using light as the stimulating signal

Details Wafer level burn-in using light as the stimulating signal Wafer level burn-in using light as the stimulating signal

2005-04-26

2005-04-26

Nguyen, Vinh P. (Department: 2829)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

C324S754120

Reexamination Certificate

active

06885203

ABSTRACT:
An apparatus comprises multiple light sources that are applied to specific locations on the surface of a wafer for the purpose of causing a component on a die to respond as if a digital signal had been applied to the component. The multiple light sources may comprise several thousand point light sources such as the individual fibers of a fiber optic bundle. The light is controlled in such a manner to stimulate operation of the electronic circuit for the purpose of burning in the circuit.

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Specification entitled, “Known Good Die—The Total Solution”, AEHR Test Systems/Nitto-Denko.

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