Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material
Reexamination Certificate
2005-07-26
2005-07-26
Chaudhuri, Olik (Department: 2824)
Semiconductor device manufacturing: process
Coating with electrically or thermally conductive material
C438S597000, C438S680000, C438S681000, C438S686000
Reexamination Certificate
active
06921710
ABSTRACT:
A technique for more efficiently forming conductive elements, such as conductive layers and electrodes, using chemical vapor deposition. A conductive precursor gas, such as a platinum precursor gas, having organic compounds to improve step coverage is introduced into a chemical vapor deposition chamber. A reactant is also introduced into the chamber that reacts with residue organic compounds on the conductive element so as to remove the organic compounds from the nucleating sites to thereby permit more efficient subsequent chemical vapor deposition of conductive elements.
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Li Weimin
Yang Sam
Chaudhuri Olik
Luhrs Michael K.
Micro)n Technology, Inc.
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