Method for producing thin film bulk acoustic resonators...

Details Method for producing thin film bulk acoustic resonators... Method for producing thin film bulk acoustic resonators...

2005-04-05

2005-04-05

Hassanzadel, P. (Department: 1763)

Metal working

Piezoelectric device making

C310S312000, C333S187000, C216S013000

Reexamination Certificate

active

06874211

ABSTRACT:
A method for fabricating a resonator, and in particular, a thin film bulk acoustic resonator (FBAR), and a resonator embodying the method are disclosed. An FBAR is fabricated on a substrate by reducing mass from a top electrode layer. For a substrate having multiple resonators, mass is reduced from only selected resonator to provide resonators having different resonance frequencies on the same substrate.

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