Method and equipment for detecting pattern defect

Details Method and equipment for detecting pattern defect Method and equipment for detecting pattern defect

2005-07-26

2005-07-26

Hannaher, Constantine (Department: 2878)

Radiant energy

Invisible radiant energy responsive electric signalling

Ultraviolet light responsive means

Reexamination Certificate

active

06921905

ABSTRACT:
Inspection apparatus and method in which laser source emits a laser beam and a coherence of the laser beam emitted from the laser source is reduced by a coherence reducer. A detector detects light from the sample irradiated with the coherence reduced laser beam and a processor processes a signal outputted from the detector and detects a defect on the sample. The coherence reducer has an optical path which includes a plurality of at least one of optical fibers and glass rods.

REFERENCES:
patent: 5264700 (1993-11-01), Tommasini et al.
patent: 5264912 (1993-11-01), Vaught et al.
patent: 5331169 (1994-07-01), Tanaka et al.
patent: 5625193 (1997-04-01), Broude et al.
patent: 6256087 (2001-07-01), Bader
patent: 6369888 (2002-04-01), Karpol et al.

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