Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
Reexamination Certificate
2005-01-04
2005-01-04
Chapman, John E. (Department: 2856)
Measuring and testing
Speed, velocity, or acceleration
Angular rate using gyroscopic or coriolis effect
C073S504120
Reexamination Certificate
active
06837107
ABSTRACT:
A micro-machined multi-sensor that provides 1-axis of acceleration sensing and 2-axes of angular rate sensing. The multi-sensor includes a plurality of accelerometers, each including a mass anchored to and suspended over a substrate by a plurality of flexures. Each accelerometer further includes acceleration sense electrode structures disposed along lateral and longitudinal axes of the respective mass. The multi-sensor includes a fork member coupling the masses to allow relative antiphase movement, and to resist in phase movement, of the masses, and a drive electrode structure for rotationally vibrating the masses in antiphase. The multi-sensor provides electrically independent acceleration sense signals along the lateral and longitudinal axes of the respective masses, which are added and/or subtracted to obtain 1-axis of acceleration sensing and 2-axes of angular rate sensing.
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Analog Devices Inc.
Chapman John E.
Weingarten Schurgin, Gagnebin & Lebovici LLP
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