Thin film forming apparatus, film supplier, film cassette,...

Adhesive bonding and miscellaneous chemical manufacture – Surface bonding means and/or assembly means therefor – With work feeding or handling means

Reexamination Certificate

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Details

C156S358000, C156S381000, C156S556000, C156S580000, C118S045000, C438S758000, C438S778000, C438S780000

Reexamination Certificate

active

06868888

ABSTRACT:
A center robot is fixed approximately in a central portion of a process part. A coating unit, a drying unit, a transfer unit, a peeling unit, a film supplying unit and a reversing unit are arranged around the center robot. The center robot comprises a hand-for-substrate and a hand-for-film which are allowed to directly access the respective units. Within a process part, the center robot transports a sheet film and/or a substrate between the coating unit, the drying unit, the transfer unit and the film supplying unit, and a thin film is formed on the substrate using the sheet film.

REFERENCES:
patent: 2559649 (1951-07-01), Little et al.
patent: 5709484 (1998-01-01), Dorner
patent: 5975740 (1999-11-01), Lin et al.
patent: 6239045 (2001-05-01), Tanaka et al.
patent: 6261012 (2001-07-01), Haas et al.
patent: 6264296 (2001-07-01), Klinefelter et al.
patent: 6689245 (2004-02-01), Tsujimoto
patent: 20010014544 (2001-08-01), Tanaka et al.
patent: 20010026720 (2001-10-01), Paulson et al.
patent: 10-144664 (1998-05-01), None
patent: 11-040642 (1999-02-01), None
patent: 2000-31071 (2000-01-01), None
patent: 135634 (2001-05-01), None

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