Test structure for determining a short circuit between...

Details Test structure for determining a short circuit between... Test structure for determining a short circuit between...

2005-05-24

2005-05-24

Coleman, W. David (Department: 2823)

Semiconductor device manufacturing: process

With measuring or testing

Reexamination Certificate

active

06897077

ABSTRACT:
A test structure allows determining a short circuit between trench capacitors in a memory cell array in which the trench capacitors are arranged in matrix form. The test structure has, in two rows of trench capacitors, a connection of the trench capacitors of each row by tunnel structures and/or bridge structures. A contact area for contact connection is provided at each end section of a trench capacitor row.

REFERENCES:
patent: 6339228 (2002-01-01), Iyer et al.
patent: 20020063272 (2002-05-01), Miyajima

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