Coherent light generators – Particular active media – Gas
Reexamination Certificate
2005-01-04
2005-01-04
Wong, Don (Department: 2828)
Coherent light generators
Particular active media
Gas
C372S057000, C372S058000, C372S059000
Reexamination Certificate
active
06839372
ABSTRACT:
The present invention provides a gas discharge ultraviolet laser capable of producing a high quality pulsed ultraviolet laser beam at pulse rates greater than 2000 Hz at pulse energies at 5 mJ or greater and having an enclosed beam path at least a portion of which comprises an oxidation agent. In a preferred embodiment a portion of the beam path comprises a sealed chamber containing a gas comprising a small concentration of oxygen. In one preferred embodiment the sealed chamber is an etalon chamber and the contained gas is nitrogen with an oxygen concentration of between 1.6 and 2.4 percent. In another preferred embodiments a small concentration of oxygen is added to the purge gas of a special purge compartment containing optical components exposed to high intensity output laser beam.
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Cybulski Raymond
Glatzel Holger K.
Melchior John T.
Pan Xiaojiang
Al-Nazer Leith A
Cray William
Cymer Inc.
Wong Don
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