Capacitive type sensor

Details Capacitive type sensor Capacitive type sensor

2005-04-19

2005-04-19

Le, N. (Department: 2858)

Electricity: measuring and testing

Impedance, admittance or other quantities representative of...

Lumped type parameters

C361S303000

Reexamination Certificate

active

06882165

ABSTRACT:
A capacitive type sensor includes a pair of electrodes disposed on a surface of an insulating substrate to face with each other, and a water vapor sensitive disposed between and in contact with the electrodes. These electrodes are each constituted by an electrically conductive material whose linear thermal expansion coefficient is less than that of the water vapor sensitive film and is substantially the same as that of the insulating substrate, and suppresses a swelling of the water vapor sensitive film caused when the sensor is placed in a high temperature/humidity environment, thus suppressing drift deterioration of the sensor.

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