Electrostatically actuated valve

Valves and valve actuation – Electrically actuated valve

Reexamination Certificate

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Reexamination Certificate

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06837476

ABSTRACT:
An electrostatically actuated valve that is relatively small, has relatively low fabrication costs, and consumes relatively low voltage and/or power. Normally closed, normally open, three (or more) way valves, and other configurations are contemplated. These electrostatically actuated valves are suitable for a wide variety of applications, including but not limited to, low power and wireless applications, for example.

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