Fixture for assembling a post-CMP cleaning brush

Details Fixture for assembling a post-CMP cleaning brush Fixture for assembling a post-CMP cleaning brush

2005-03-15

2005-03-15

McNeil, Jennifer (Department: 1775)

Brushing, scrubbing, and general cleaning

Machines

Brushing

C015S001000, C015S088300, C029S234000, C029S235000, C029S895230, C300S001000, C300S021000

Reexamination Certificate

active

06865764

ABSTRACT:
A fixture for assembling a post-CMP cleaning brush. The post-CMP cleaning brush is provided with a brush core and an outer brush, and the outer brush is provided with a hollow portion. The fixture comprises a base, a plurality of posts and a guiding member. The base is provided with a plurality of holes. The posts insert into the holes of the base through the hollow portion of the outer brush respectively so as to assist the brush core in passing through the hollow portion of the outer brush. The guiding member is connected with the brush core to assist the brush core in passing through the hollow portion of the outer brush.

REFERENCES:
patent: 6363594 (2002-04-01), Jahani et al.

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