Monolithic vibration isolation and an ultra-high Q...

Details Monolithic vibration isolation and an ultra-high Q... Monolithic vibration isolation and an ultra-high Q...

2005-03-01

2005-03-01

Mis, David (Department: 2817)

Oscillators

Electromechanical resonator

Vibrating reed or string type

C331S175000, C333S200000

Reexamination Certificate

active

06861914

ABSTRACT:
A mechanical oscillator is provided for use in micro-electromechanical systems (MEMS) for application in radio frequency filters and oscillators, motion and pressure sensors and other micro applications. The oscillator is of monolithic construction and has a high Q with little energy loss because of teeth attached to the oscillating member which contain energy and prevent losses.

REFERENCES:
patent: 5959516 (1999-09-01), Chang et al.

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