Digital output MEMS pressure sensor and method

Details Digital output MEMS pressure sensor and method Digital output MEMS pressure sensor and method

2005-03-22

2005-03-22

Oen, William (Department: 2855)

Measuring and testing

Fluid pressure gauge

Combined

Reexamination Certificate

active

06868731

ABSTRACT:
A method and pressure-sensor system provide a digital-frequency output linearly proportional to a sensed pressure. The system comprises a MEMS pressure-sensing element to provide a pressure-sensing output and voltage-to-frequency converter provide the digital-frequency output. The pressure-sensor system may also comprise an amplifier to provide an output voltage linearly proportional to the pressure. A temperature sensor and temperature-compensation circuitry provide a temperature-compensation signal to the amplifier to at least partially offset the effects of temperature on the system. Some embodiments of the present invention comprise a microcontroller system comprising a microcontroller and an RF transmitter. The microcontroller may receive the digital-frequency output and may generate a notification signal when the sensed pressure is inside or outside a predetermined pressure range. The RF transmitter may transmit an RF signal to indicate that the sensed pressure is inside or outside the predetermined pressure range.

REFERENCES:
patent: 3978731 (1976-09-01), Reeder et al.
“High Temperature Accuracy Integrated Silicon Pressure Sensor for Measuring Absolute Pressure . . . ,”Motorola , Inc., 2001,MPXA6115A/D,(2001), 1-9 no month.
“Packing the Micro-machine,”Amkor Technology, 1-6 no date.

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