Monomer having electron-withdrawing group and process for...

Details Monomer having electron-withdrawing group and process for... Monomer having electron-withdrawing group and process for...

2005-09-27

2005-09-27

Choi, Ling-Sui (Department: 1713)

Synthetic resins or natural rubbers -- part of the class 520 ser

Synthetic resins

Polymers from only ethylenic monomers or processes of...

C526S266000, C526S247000

Reexamination Certificate

active

06949615

ABSTRACT:
A monomer containing an electron-withdrawing group of the present invention is represented by following Formula (a), (b) or (c):wherein A1, A2, and A3are each a ring; Ra, Rb, Rc, and Ruare the same or different and are each a hydrogen atom or organic group; at least one of Rs, Rwand Rv, at least one of Rtand Rw1, and at least one of the two Rw2s are each an electron-withdrawing group, and the others are each a hydrogen atom or organic group; W1is a single bond or linkage group; and n denotes an integer of 2 to 25, where at least two of Ra, Rb, Rc, Rs, Rt, Ru, Rv, Rw, Rw1, Rw2, W1, and carbon atoms constituting ring A1, carbon atoms constituting ring A2, and carbon atoms constituting ring A3may be combined to form a ring, respectively. The electron-withdrawing groups in Rs, Rt, Rv, Rw, Rw1, and Rw2are, for example, groups each containing a fluorine atom. The monomer is useful as a raw material for photoresist polymeric compounds.

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