Optical: systems and elements – Optical modulator – Light wave temporal modulation
Reexamination Certificate
2005-03-15
2005-03-15
Ben, Loha (Department: 2873)
Optical: systems and elements
Optical modulator
Light wave temporal modulation
C359S290000, C359S295000, C359S298000, C359S224200, C359S850000, C359S855000, C216S002000, C353S031000, C438S052000
Reexamination Certificate
active
06867897
ABSTRACT:
A spatial light modulator is disclosed, along with methods for making such a modulator, that comprises an array of micromirrors each having a hinge and a micromirror plate held via the hinge on a substrate, the micromirror plate being disposed in a plane separate from the hinge and having a diagonal extending across the micromirror plate, the micromirror plate being attached to the hinge such that the micromirror plate can rotate along a rotation axis that is parallel to, but off-set from the diagonal of the micromirror plate. Also disclosed is a projection system that comprises such a spatial light modulator, as well as a light source, condensing optics, wherein light from the light source is focused onto the array of micromirrors, projection optics for projecting light selectively reflected from the array of micromirrors onto a target, and a controller for selectively actuating the micromirrors in the array.
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Huibers Andrew G.
Patel Satyadev R.
Ben Loha
Muir Gregory R.
Reflectivity, INC
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