Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate
2005-05-10
2005-05-10
Lauchman, Layla G. (Department: 2877)
Optics: measuring and testing
Inspection of flaws or impurities
Surface condition
C356S237300, C356S237500, C356S237400, C356S073000, C356S625000
Reexamination Certificate
active
06891610
ABSTRACT:
Methods and systems for monitoring semiconductor fabrication processes are provided. A system may include a stage configured to support a specimen and coupled to a measurement device. The measurement device may include an illumination system and a detection system. The illumination system and the detection system may be configured such that the system may be configured to determine multiple properties of the specimen. For example, the system may be configured to determine multiple properties of a specimen including, but not limited to, an implant characteristic and a presence of defects. In this manner, a measurement device may perform multiple optical and/or non-optical metrology and/or inspection techniques.
REFERENCES:
patent: 3946484 (1976-03-01), Aronstein et al.
patent: 4232063 (1980-11-01), Rosler et al.
patent: 4247203 (1981-01-01), Levy et al.
patent: 4347001 (1982-08-01), Levy et al.
patent: 4378159 (1983-03-01), Galbraith
patent: 4448532 (1984-05-01), Joseph et al.
patent: 4511800 (1985-04-01), Harbeke et al.
patent: 4532650 (1985-07-01), Wihl et al.
patent: 4555798 (1985-11-01), Broadbent, Jr. et al.
patent: 4556317 (1985-12-01), Sandland et al.
patent: 4559450 (1985-12-01), Robinson et al.
patent: 4571685 (1986-02-01), Kamoshida
patent: 4578589 (1986-03-01), Aitken
patent: 4579455 (1986-04-01), Levy et al.
patent: 4579463 (1986-04-01), Rosencwaig et al.
patent: 4587432 (1986-05-01), Aitken
patent: 4599558 (1986-07-01), Castellano, Jr. et al.
patent: 4601576 (1986-07-01), Galbraith
patent: 4618938 (1986-10-01), Sandland et al.
patent: 4619529 (1986-10-01), Iuchi et al.
patent: 4631416 (1986-12-01), Trunta, Jr.
patent: 4633504 (1986-12-01), Wihl
patent: 4641967 (1987-02-01), Pecen
patent: 4644172 (1987-02-01), Sandland et al.
patent: 4645929 (1987-02-01), Criegern et al.
patent: 4710030 (1987-12-01), Tauc et al.
patent: 4733091 (1988-03-01), Robinson et al.
patent: 4743767 (1988-05-01), Plumb et al.
patent: 4750822 (1988-06-01), Rosencwaig et al.
patent: 4766324 (1988-08-01), Saadat et al.
patent: 4770536 (1988-09-01), Golberstein
patent: 4805123 (1989-02-01), Specht et al.
patent: 4807994 (1989-02-01), Felch et al.
patent: 4812756 (1989-03-01), Curtis et al.
patent: 4818110 (1989-04-01), Davidson
patent: 4842683 (1989-06-01), Cheng et al.
patent: 4845558 (1989-07-01), Tsai et al.
patent: 4854710 (1989-08-01), Opsal et al.
patent: 4865445 (1989-09-01), Kuriyama et al.
patent: 4877326 (1989-10-01), Chadwick et al.
patent: 4898471 (1990-02-01), Stonestrom et al.
patent: 4899055 (1990-02-01), Adams
patent: 4905170 (1990-02-01), Forouhi et al.
patent: 4912326 (1990-03-01), Naito
patent: 4926489 (1990-05-01), Danielson et al.
patent: 4999014 (1991-03-01), Gold et al.
patent: 4999578 (1991-03-01), Ohashi et al.
patent: 5023424 (1991-06-01), Vaught
patent: 5042951 (1991-08-01), Gold et al.
patent: 5043589 (1991-08-01), Smedt et al.
patent: 5047648 (1991-09-01), Fishkin et al.
patent: 5074669 (1991-12-01), Opsal
patent: 5076692 (1991-12-01), Neukermans et al.
patent: 5112129 (1992-05-01), Davidson et al.
patent: 5114235 (1992-05-01), Suda et al.
patent: 5181080 (1993-01-01), Fanton et al.
patent: 5182455 (1993-01-01), Muraki
patent: 5182610 (1993-01-01), Shibata
patent: 5189481 (1993-02-01), Jann et al.
patent: 5189494 (1993-02-01), Muraki
patent: 5215619 (1993-06-01), Cheng et al.
patent: 5264912 (1993-11-01), Vaught et al.
patent: 5316984 (1994-05-01), Leourx
patent: 5327221 (1994-07-01), Saitoh et al.
patent: 5340992 (1994-08-01), Matsugu et al.
patent: 5344491 (1994-09-01), Katou
patent: 5355212 (1994-10-01), Wells et al.
patent: 5377006 (1994-12-01), Nakata
patent: 5393624 (1995-02-01), Ushijima
patent: 5401316 (1995-03-01), Shiraishi et al.
patent: 5412473 (1995-05-01), Rosencwaig et al.
patent: 5414514 (1995-05-01), Smith et al.
patent: 5438313 (1995-08-01), Henderson et al.
patent: 5438413 (1995-08-01), Mazor et al.
patent: 5485091 (1996-01-01), Verkuil
patent: 5516608 (1996-05-01), Hobbs et al.
patent: 5517312 (1996-05-01), Finarov
patent: 5520769 (1996-05-01), Barrett et al.
patent: 5537669 (1996-07-01), Evans et al.
patent: 5563702 (1996-10-01), Emery et al.
patent: 5565979 (1996-10-01), Gross
patent: 5572598 (1996-11-01), Wihl et al.
patent: 5574278 (1996-11-01), Poirier
patent: 5581350 (1996-12-01), Chen et al.
patent: 5594247 (1997-01-01), Verkuil et al.
patent: 5596406 (1997-01-01), Rosencwaig et al.
patent: 5596411 (1997-01-01), Fanton et al.
patent: 5604344 (1997-02-01), Finarov
patent: 5604585 (1997-02-01), Johnson et al.
patent: 5608526 (1997-03-01), Piwonka-Corle et al.
patent: 5614060 (1997-03-01), Hanawa
patent: 5619548 (1997-04-01), Koppel
patent: 5633747 (1997-05-01), Nikoonahad
patent: 5641969 (1997-06-01), Cooke et al.
patent: 5644223 (1997-07-01), Verkuil
patent: 5650731 (1997-07-01), Fung et al.
patent: 5652654 (1997-07-01), Asimopoulos
patent: 5666196 (1997-09-01), Ishii et al.
patent: 5682242 (1997-10-01), Eylon
patent: 5684393 (1997-11-01), Ryat
patent: 5689614 (1997-11-01), Gronet et al.
patent: 5695568 (1997-12-01), Sinha et al.
patent: 5699156 (1997-12-01), Carver
patent: 5703692 (1997-12-01), McNeil et al.
patent: 5712707 (1998-01-01), Ausschnitt et al.
patent: 5730642 (1998-03-01), Sandhu et al.
patent: 5737072 (1998-04-01), Emery et al.
patent: 5740226 (1998-04-01), Komiya et al.
patent: 5747813 (1998-05-01), Norton et al.
patent: 5748318 (1998-05-01), Maris et al.
patent: 5754297 (1998-05-01), Nulman
patent: 5757507 (1998-05-01), Ausschnitt et al.
patent: 5764365 (1998-06-01), Finarov
patent: 5767693 (1998-06-01), Verkuil
patent: 5770099 (1998-06-01), Rice et al.
patent: 5771094 (1998-06-01), Carter et al.
patent: 5783342 (1998-07-01), Yamashita et al.
patent: 5798529 (1998-08-01), Wagner
patent: 5798829 (1998-08-01), Vaez-Iravani
patent: 5798837 (1998-08-01), Aspnes et al.
patent: 5801390 (1998-09-01), Shiraishi
patent: 5805290 (1998-09-01), Ausschnitt et al.
patent: 5822055 (1998-10-01), Tsai et al.
patent: 5825482 (1998-10-01), Nikoonahad et al.
patent: 5831865 (1998-11-01), Berezin et al.
patent: 5844684 (1998-12-01), Maris et al.
patent: 5849136 (1998-12-01), Mintz et al.
patent: 5859424 (1999-01-01), Norton et al.
patent: 5859964 (1999-01-01), Wang et al.
patent: 5864394 (1999-01-01), Jordan, III et al.
patent: 5866437 (1999-02-01), Chen et al.
patent: 5867590 (1999-02-01), Eylon
patent: 5872633 (1999-02-01), Holzapfel et al.
patent: 5877859 (1999-03-01), Aspnes et al.
patent: 5882165 (1999-03-01), Maydan et al.
patent: 5883374 (1999-03-01), Mathews
patent: 5883710 (1999-03-01), Nikoonahad et al.
patent: 5886355 (1999-03-01), Bright et al.
patent: 5887085 (1999-03-01), Otsuka
patent: 5889593 (1999-03-01), Bareket
patent: 5896294 (1999-04-01), Chow et al.
patent: 5900939 (1999-05-01), Aspnes et al.
patent: 5909276 (1999-06-01), Kinney et al.
patent: 5910011 (1999-06-01), Cruse
patent: 5910842 (1999-06-01), Piwonka-Corle et al.
patent: 5914784 (1999-06-01), Ausschnitt et al.
patent: 5917588 (1999-06-01), Addiego
patent: 5917594 (1999-06-01), Norton
patent: 5920076 (1999-07-01), Burgin et al.
patent: 5923423 (1999-07-01), Sawatari et al.
patent: 5926690 (1999-07-01), Toprac et al.
patent: 5930138 (1999-07-01), Lin et al.
patent: 5935338 (1999-08-01), Lei et al.
patent: 5935397 (1999-08-01), Masterson
patent: 5943122 (1999-08-01), Holmes
patent: 5955661 (1999-09-01), Samsavar et al.
patent: 5959735 (1999-09-01), Maris et al.
patent: 5959812 (1999-09-01), Rothermel
patent: 5963314 (1999-10-01), Worster et al.
patent: 5963783 (1999-10-01), Lowell et al.
patent: 5964643 (1999-10-01), Birang et al.
patent: 5966312 (1999-10-01), Chen
patent: 5968691 (1999-10-01), Yoshioka et al.
patent: 5973323 (1999-10-01), Adler et al.
patent: 5973787 (1999-10-01), Aspnes et al.
patent: 5976310 (1999-11-01), Levy
patent: 5978074 (1999-11-01), Opsal et al.
patent: 5982482 (1999-11-01), Nelson et al.
patent: 5985497 (1999-11-01), Phan et al.
patent: 6008906 (1999-12-01), Maris
patent: 6012966 (2000-01-01), Ban et al.
patent: 6020214 (2000-02-01), Watanabe et al.
patent: 6020957 (2000-02-01), Rosengaus et al.
patent: 6023338 (2000-02-01), Bareket
patent: 6
Brown Kyle A.
Bultman Gary
Fielden John
Levy Ady
Nikoonahad Mehrdad
Daffer McDaniel LLP
KLA-Tencor Technologies Corp.
Lauchman Layla G.
Mewherter Ann Marie
LandOfFree
Methods and systems for determining an implant... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Methods and systems for determining an implant..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Methods and systems for determining an implant... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3399434