Apparatus and method for treating a workpiece using plasma...

Coating processes – Direct application of electrical – magnetic – wave – or... – Pretreatment of coating supply or source outside of primary...

Reexamination Certificate

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

C427S488000, C427S491000, C427S575000, C216S069000

Reexamination Certificate

active

06841201

ABSTRACT:
An apparatus and method that generates plasma using a microwave radiation supply. The plasma is used to treat a surface of a workpiece at approximately atmospheric pressure. Plasma excites a working gas to create an excited gaseous species without degradation from undue heat caused by the plasma. The gaseous species exit an outlet of the apparatus to treat the surface of a workpiece when the outlet is juxtaposed with the workpiece.

REFERENCES:
patent: 4138306 (1979-02-01), Niwa
patent: 4652723 (1987-03-01), Salinier et al.
patent: 5049406 (1991-09-01), Geittner et al.
patent: 5084126 (1992-01-01), McKee
patent: 5120568 (1992-06-01), Schuurmans et al.
patent: 5387842 (1995-02-01), Roth et al.
patent: 5403453 (1995-04-01), Roth et al.
patent: 5423942 (1995-06-01), Robbins et al.
patent: 5549780 (1996-08-01), Koinuma et al.
patent: 5628883 (1997-05-01), Sugiyama et al.
patent: 5671045 (1997-09-01), Woskov et al.
patent: 5830540 (1998-11-01), Bowers
patent: 6005349 (1999-12-01), Kunhardt et al.
patent: 6081329 (2000-06-01), Cohn et al.
patent: 6262523 (2001-07-01), Selwyn et al.
patent: 6287642 (2001-09-01), Leutsch et al.
patent: 6308654 (2001-10-01), Schneider et al.
patent: 6406759 (2002-06-01), Roth
patent: 6613394 (2003-09-01), Kuckertz et al.
patent: 1 162 646 (2001-12-01), None
patent: 1994252051 (1994-09-01), None
patent: 2001-159074 (2001-06-01), None
patent: 2003514114 (2003-04-01), None
patent: WO 0079843 (2000-12-01), None
patent: WO 0144790 (2001-06-01), None
patent: WO 0193315 (2001-12-01), None
patent: WO 02065820 (2002-08-01), None
patent: WO 02099836 (2002-12-01), None
JP 05251198, abstract of , by K. Takehisa.
Takaki, et al., “Multipoint Barner Discharge Process for Removal of NOx from Diesel Engine Exhaust”, IEEE Transactions on Plasma Science, vol. 29, No. 3, Jun. 2001.
Bayer, et al., “Overall kinetics of SiOxremote-PECVD using different organosilicon monomers”, Surface and Coatings Technolog 116-119 (1999), pp. 874-878, no month.
Karches et al., “A circulating fluidized bed for plasma-enhanced chemical vapor deposition on powders at low tmeperatures”, Surface and Coatings Technology 116-119 (1999) pp. 879-885, no month.
ASTEX®, “Downstream Sources for Etch and Deposition,” Feb. 1, 1991, Applied Science Technology, Inc., Wobum, Mass.
ASTEX®, “Providing Innovation in Plasma, Power and Reactive Gases,” Jan.-Feb. 2001, Applied Science Technology, Inc., Wobum, Mass.
AX7200, Atmospheric Plasma Torch instructions, received May, 2001.
U.S. Appl. No. 10/027,646, filed Dec. 21, 2001, inventor Datta et al.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Apparatus and method for treating a workpiece using plasma... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Apparatus and method for treating a workpiece using plasma..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Apparatus and method for treating a workpiece using plasma... will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-3396733

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.