Apparatus for detecting optical positional deviation

Details Apparatus for detecting optical positional deviation Apparatus for detecting optical positional deviation

2005-04-26

2005-04-26

Smith, Zandra V. (Department: 2877)

Optics: measuring and testing

By alignment in lateral direction

With registration indicia

C356S400000

Reexamination Certificate

active

06885450

ABSTRACT:
An optical positional deviation detecting apparatus comprises an irradiation optical system for irradiating a measurement mark configured by forming a second mark (e.g., a resist mark) on a first mark (e.g., a base mark) with a beam of irradiation, an image forming optical system for forming an image of the measurement mark by converging reflected beam from the measurement mark, an imaging device for photographing the image of the measurement mark, which has been formed by the image forming optical system, an image processing device for measuring the positional deviation in alignment of the second mark with respect to the first mark by processing an image signal obtained by the imaging device, and an image field area adjustment mechanism for adjusting an image field area for the imaging device to photograph the image of the measurement mark.

REFERENCES:
patent: 4668077 (1987-05-01), Tanaka
patent: 4687322 (1987-08-01), Tanimoto et al.
patent: 5680200 (1997-10-01), Sugaya et al.
patent: 5754299 (1998-05-01), Sugaya et al.
patent: 5920398 (1999-07-01), Iwanaga et al.
patent: 6023338 (2000-02-01), Bareket
patent: 6081385 (2000-06-01), Konno et al.
patent: 6163376 (2000-12-01), Nomura et al.
patent: 6538740 (2003-03-01), Shiraishi et al.
patent: 08-115874 (1996-05-01), None

Affiliated with

Also associated with

Rating

Apparatus for detecting optical positional deviation does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Apparatus for detecting optical positional deviation, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Apparatus for detecting optical positional deviation will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3391259