Optical component thickness adjustment method and optical...

Details Optical component thickness adjustment method and optical... Optical component thickness adjustment method and optical...

2005-04-05

2005-04-05

Sugarman, Scott J. (Department: 2873)

Optical: systems and elements

Lens

C359S743000, C427S248100

Reexamination Certificate

active

06876498

ABSTRACT:
If after manufacture it is found that the thickness of a solid immersion lens is less than a target thickness value, an adjustment portion is adhered thereto by vapor deposition so as to reduce the amount of thickness deficiency. If the solid immersion lens is made of quartz glass, SiO2is used as the material which is vapor deposited. If the thickness of the solid immersion lens is greater than the target value, then it is reduced by etching.

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U.S. Appl. No. 10/665,568, filed Sep. 2003, Hori.

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