Coating processes – Immersion or partial immersion
Reexamination Certificate
2005-01-25
2005-01-25
Chen, Bret (Department: 1762)
Coating processes
Immersion or partial immersion
C427S443100, C427S437000
Reexamination Certificate
active
06846519
ABSTRACT:
The method for electroless deposition of a coating material, which may be a metal, semiconductor, or dielectric, that is carried out at a relatively low temperature of the working solution compensated by an increased temperature on the substrate which is controlled by a heater built into the substrate chuck. A decrease in the temperature of the working solution prevents thermal decomposition of the solution and reduces formation of gas bubbles, normally generated at increased temperatures. Accumulation of bubbles on the surface of the substrate is further prevented due to upwardly-facing orientation of the treated surface of the substrate. The substrate holder is equipped with a substrate heater and a substrate cooler, that can be used alternatingly for quick heating or cooling of the substrate surface.
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U.S. patent application Ser. No. 103,015, Ivanov et al., filed Mar. 22, 2002.
Ivanov Igor C.
Kolics Artur
Zhang Jonathan Welgun
Blue29 LLC
Chen Bret
Daffer McDaniel LLP
Lettang Mollie E.
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