Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Reexamination Certificate
2005-09-20
2005-09-20
Lee, John R. (Department: 2881)
Radiant energy
With charged particle beam deflection or focussing
Magnetic lens
C250S3960ML, C250S492100, C250S492200, C250S492210, C250S492300, C250S505100, C250S517100, C250S306000, C250S307000, C250S309000, C250S310000, C250S311000, C313S389000, C430S942000
Reexamination Certificate
active
06946663
ABSTRACT:
A method of efficiently fabricating a multipole lens. The multipole lens has plural polar elements and an annular holding member. Each polar element has a held portion. The annular holding member is provided with through-holes for holding the held portions of the polar elements. A resin is injected into the through-holes in the holding member via openings formed in the holding member, the openings being in communication with the through-holes. The injected resin is cured, thus holding the held portions of the polar elements to the holding member within the through-holes.
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Jeol Ltd.
Lee John R.
Souw Bernard E.
The Webb Law Firm
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