Abrading – Machine – Rotary tool
Reexamination Certificate
2005-07-19
2005-07-19
Rachuba, M. (Department: 3723)
Abrading
Machine
Rotary tool
C451S527000, C451S528000, C451S529000
Reexamination Certificate
active
06918824
ABSTRACT:
An assembly for a chemical-mechanical polishing process includes a platen having an outer edge, a top surface, and at least one inlet for introducing fluid to the top surface; a manifold system, entrenched in the top surface and in communication with the at least one inlet, for channeling the fluid about the top surface; a polishing pad having a top pad surface, and a plurality of fluid delivery through-holes for introducing the fluid from the manifold system to the top pad surface; and a fluid distribution system, entrenched in the top pad surface and in communication with the through-holes, for substantially uniformly distributing the fluid about the top pad surface. The fluid distribution system includes a set of intersecting first grooves defining an array of lands, each of the first grooves having a first cross sectional area. The fluid distribution system also includes a plurality of second grooves disposed within each of the lands and communicating with the first grooves, each of the second grooves having a second cross sectional area that is smaller than the first cross sectional area.
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Cohen David
Joh Sooyun
Marquardt Dave
McInerney Edward J.
Ingrassia Fisher & Lorenz PC
Novellus Systems Inc.
Rachuba M.
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