Carrier apparatus

Details Carrier apparatus Carrier apparatus

1991-09-18

1992-07-14

Wintercorn, Richard A.

Photocopying

Projection printing and copying cameras

Detailed holder for photosensitive paper

355 53, 355 76, G03B 2760

Patent

active

051307472

ABSTRACT:
A carrier apparatus for carrying a plane member such as a semiconductor wafer, a mask for exposure, a optical disk substrate, a liquid crystal panel and so on. To hold such a flat member tightly, the carrier apparatus comprises an elastic member between a holding part and a carrier arm.

REFERENCES:
patent: 4040736 (1977-08-01), Johannsmeier
patent: 4189230 (1980-02-01), Zasio
patent: 4522489 (1985-06-01), Bouwer
patent: 4575231 (1986-03-01), Seto
patent: 4669868 (1987-06-01), Chapelle et al.
patent: 4788577 (1988-11-01), Akiyama et al.
SMC Cooperation Catalog, Free Mount Cylinder With Vacuum Pad, CAT. 88S100-10A.

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