Surface inspection system

Details Surface inspection system Surface inspection system

2005-09-13

2005-09-13

Williams, Hezron (Department: 2856)

Measuring and testing

Instrument proving or calibrating

Displacement, motion, distance, or position

C073S865800, C356S243400, C356S243700, C702S104000

Reexamination Certificate

active

06941792

ABSTRACT:
A surface inspection system, comprising a calibration wafer where particles of known specifications are spread, a wafer transport unit having a transport robot, a surface inspection unit, and a calibration wafer accommodation unit for accommodating the calibration wafer.

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patent: 2001/0048523 (2001-12-01), Fossey et al.
patent: 62118535 (1987-05-01), None
patent: 066730 (1994-03-01), None
patent: 338440 (1994-12-01), None
patent: 2001118895 (2001-04-01), None

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