Sensor having membrane and method for manufacturing the same

Details Sensor having membrane and method for manufacturing the same Sensor having membrane and method for manufacturing the same

2005-03-22

2005-03-22

Oen, William (Department: 2855)

Measuring and testing

Fluid pressure gauge

Electrical

Reexamination Certificate

active

06868733

ABSTRACT:
A sensor device includes a circuit chip, an adhesion film, and a sensor chip mounted on the circuit chip through the adhesion film. The sensor chip includes a substrate having foreside and backside surfaces, a concavity disposed on the backside surface of the substrate, and a membrane disposed on the foreside surface of the substrate so that the membrane covers the concavity. The adhesion film is disposed between the sensor chip and the circuit chip so as to form a passage for connecting between the concavity and an outside of the concavity.

REFERENCES:
patent: 5412992 (1995-05-01), Tobita et al.
patent: 6047604 (2000-04-01), Auburger et al.
patent: A-H07-58134 (1995-03-01), None
patent: A-2002-33341 (2002-01-01), None

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