Photocopying – Projection printing and copying cameras – Step and repeat
Patent
1992-12-07
1994-08-30
Rutledge, D.
Photocopying
Projection printing and copying cameras
Step and repeat
355 77, 430311, G03B 2742
Patent
active
053432703
ABSTRACT:
In a projection exposure apparatus wherein a stage is moved in the direction of optic axis when a mask formed with a predetermined pattern is projected by a shutter onto a photosensitive substrate placed on the stage through a projection optical system, the operations of control means for the shutter and control means for the stage are interlocked with each other on the basis of the operational characteristic of the shutter and the operational characteristics (particularly the speed characteristic) of the stage so that the distribution of the existence probability with respect to movement of the photosensitive substrate from the opening operation starting point of time till the closing operation completing point of time of the shutter, with respect to the direction of the optic axis, may assume substantially equal maximum values at at least two locations in the direction of the optic axis.
REFERENCES:
patent: 4869999 (1989-09-01), Fukuda et al.
Patent Abstracts of Japan, vol. 7, No. 90 (P-191) Apr. 14, 1983.
IBM Technical Disclosure Bulletin, vol. 32, No. 1, Jun. 1989, New York US, pp. 125-127; `Extended Focal Depth Microlithography`.
Magome Nobutaka
Makinouchi Susumu
Sakakibara Yasuyuki
Shiraishi Naomasa
Nikon Corporation
Rutledge D.
LandOfFree
Projection exposure apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Projection exposure apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Projection exposure apparatus will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-33168